10/16/2011	9:43:24 AM	Recipe started at 9:43 AM
10/16/2011	9:43:24 AM	Helium valve closed
10/16/2011	9:43:24 AM	H2 valve closed
10/16/2011	9:43:24 AM	BCl3 valve closed
10/16/2011	9:43:24 AM	PH3 valve closed
10/16/2011	9:43:24 AM	SiCl4 pre valve closed
10/16/2011	9:43:24 AM	SiCl4 post valve closed
10/16/2011	9:43:24 AM	Bypass valve closed
10/16/2011	9:43:24 AM	Bubbler valve closed
10/16/2011	9:43:24 AM	Main Vac valve opened
10/16/2011	9:43:24 AM	Helium MFC set to  0.000000
10/16/2011	9:43:24 AM	H2 MFC set to  0.000000
10/16/2011	9:43:24 AM	BCl3 MFC set to  0.000000
10/16/2011	9:43:24 AM	PHl3 MFC set to  0.000000
10/16/2011	9:43:24 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:43:24 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:43:24 AM	Tube furnace set to 150
10/16/2011	9:43:25 AM	H2 valve closed
10/16/2011	9:43:25 AM	BCl3 valve closed
10/16/2011	9:43:25 AM	PH3 valve closed
10/16/2011	9:43:25 AM	SiCl4 pre valve closed
10/16/2011	9:43:25 AM	SiCl4 post valve closed
10/16/2011	9:43:25 AM	Bypass valve closed
10/16/2011	9:43:25 AM	Bubbler valve closed
10/16/2011	9:43:25 AM	Helium valve opened
10/16/2011	9:43:25 AM	Main Vac valve opened
10/16/2011	9:43:25 AM	Helium MFC set to  20.000000
10/16/2011	9:43:25 AM	H2 MFC set to  0.000000
10/16/2011	9:43:25 AM	BCl3 MFC set to  0.000000
10/16/2011	9:43:25 AM	PHl3 MFC set to  0.000000
10/16/2011	9:43:25 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:43:25 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:43:25 AM	Tube furnace set to 150
10/16/2011	9:43:55 AM	Helium valve closed
10/16/2011	9:43:55 AM	H2 valve closed
10/16/2011	9:43:55 AM	BCl3 valve closed
10/16/2011	9:43:55 AM	PH3 valve closed
10/16/2011	9:43:55 AM	SiCl4 pre valve closed
10/16/2011	9:43:55 AM	SiCl4 post valve closed
10/16/2011	9:43:55 AM	Bypass valve closed
10/16/2011	9:43:55 AM	Bubbler valve closed
10/16/2011	9:43:55 AM	Main Vac valve opened
10/16/2011	9:43:55 AM	Helium MFC set to  0.000000
10/16/2011	9:43:55 AM	H2 MFC set to  0.000000
10/16/2011	9:43:55 AM	BCl3 MFC set to  0.000000
10/16/2011	9:43:55 AM	PHl3 MFC set to  0.000000
10/16/2011	9:43:55 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:43:55 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:43:55 AM	Tube furnace set to 150
10/16/2011	9:44:25 AM	H2 valve closed
10/16/2011	9:44:25 AM	BCl3 valve closed
10/16/2011	9:44:25 AM	PH3 valve closed
10/16/2011	9:44:25 AM	SiCl4 pre valve closed
10/16/2011	9:44:25 AM	SiCl4 post valve closed
10/16/2011	9:44:25 AM	Bypass valve closed
10/16/2011	9:44:25 AM	Bubbler valve closed
10/16/2011	9:44:25 AM	Helium valve opened
10/16/2011	9:44:25 AM	Main Vac valve opened
10/16/2011	9:44:25 AM	Helium MFC set to  20.000000
10/16/2011	9:44:25 AM	H2 MFC set to  0.000000
10/16/2011	9:44:25 AM	BCl3 MFC set to  0.000000
10/16/2011	9:44:25 AM	PHl3 MFC set to  0.000000
10/16/2011	9:44:25 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:44:25 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:44:26 AM	Tube furnace set to 150
10/16/2011	9:44:56 AM	Helium valve closed
10/16/2011	9:44:56 AM	H2 valve closed
10/16/2011	9:44:56 AM	BCl3 valve closed
10/16/2011	9:44:56 AM	PH3 valve closed
10/16/2011	9:44:56 AM	SiCl4 pre valve closed
10/16/2011	9:44:56 AM	SiCl4 post valve closed
10/16/2011	9:44:56 AM	Bypass valve closed
10/16/2011	9:44:56 AM	Bubbler valve closed
10/16/2011	9:44:56 AM	Main Vac valve opened
10/16/2011	9:44:56 AM	Helium MFC set to  0.000000
10/16/2011	9:44:56 AM	H2 MFC set to  0.000000
10/16/2011	9:44:56 AM	BCl3 MFC set to  0.000000
10/16/2011	9:44:56 AM	PHl3 MFC set to  0.000000
10/16/2011	9:44:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:44:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:44:56 AM	Tube furnace set to 150
10/16/2011	9:45:26 AM	H2 valve closed
10/16/2011	9:45:26 AM	BCl3 valve closed
10/16/2011	9:45:26 AM	PH3 valve closed
10/16/2011	9:45:26 AM	SiCl4 pre valve closed
10/16/2011	9:45:26 AM	SiCl4 post valve closed
10/16/2011	9:45:26 AM	Bypass valve closed
10/16/2011	9:45:26 AM	Bubbler valve closed
10/16/2011	9:45:26 AM	Helium valve opened
10/16/2011	9:45:26 AM	Main Vac valve opened
10/16/2011	9:45:26 AM	Helium MFC set to  20.000000
10/16/2011	9:45:26 AM	H2 MFC set to  0.000000
10/16/2011	9:45:26 AM	BCl3 MFC set to  0.000000
10/16/2011	9:45:26 AM	PHl3 MFC set to  0.000000
10/16/2011	9:45:26 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:45:26 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:45:26 AM	Tube furnace set to 150
10/16/2011	9:45:56 AM	Helium valve closed
10/16/2011	9:45:56 AM	H2 valve closed
10/16/2011	9:45:56 AM	BCl3 valve closed
10/16/2011	9:45:56 AM	PH3 valve closed
10/16/2011	9:45:56 AM	SiCl4 pre valve closed
10/16/2011	9:45:56 AM	SiCl4 post valve closed
10/16/2011	9:45:56 AM	Bypass valve closed
10/16/2011	9:45:56 AM	Bubbler valve closed
10/16/2011	9:45:56 AM	Main Vac valve opened
10/16/2011	9:45:56 AM	Helium MFC set to  0.000000
10/16/2011	9:45:56 AM	H2 MFC set to  0.000000
10/16/2011	9:45:56 AM	BCl3 MFC set to  0.000000
10/16/2011	9:45:56 AM	PHl3 MFC set to  0.000000
10/16/2011	9:45:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:45:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:45:56 AM	Tube furnace set to 150
10/16/2011	9:46:26 AM	H2 valve closed
10/16/2011	9:46:26 AM	BCl3 valve closed
10/16/2011	9:46:26 AM	PH3 valve closed
10/16/2011	9:46:26 AM	SiCl4 pre valve closed
10/16/2011	9:46:26 AM	SiCl4 post valve closed
10/16/2011	9:46:26 AM	Bypass valve closed
10/16/2011	9:46:26 AM	Bubbler valve closed
10/16/2011	9:46:26 AM	Helium valve opened
10/16/2011	9:46:26 AM	Main Vac valve opened
10/16/2011	9:46:26 AM	Helium MFC set to  20.000000
10/16/2011	9:46:26 AM	H2 MFC set to  0.000000
10/16/2011	9:46:26 AM	BCl3 MFC set to  0.000000
10/16/2011	9:46:26 AM	PHl3 MFC set to  0.000000
10/16/2011	9:46:26 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:46:26 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:46:26 AM	Tube furnace set to 150
10/16/2011	9:46:56 AM	Helium valve closed
10/16/2011	9:46:56 AM	H2 valve closed
10/16/2011	9:46:56 AM	BCl3 valve closed
10/16/2011	9:46:56 AM	PH3 valve closed
10/16/2011	9:46:56 AM	SiCl4 pre valve closed
10/16/2011	9:46:56 AM	SiCl4 post valve closed
10/16/2011	9:46:56 AM	Bypass valve closed
10/16/2011	9:46:56 AM	Bubbler valve closed
10/16/2011	9:46:56 AM	Main Vac valve opened
10/16/2011	9:46:56 AM	Helium MFC set to  0.000000
10/16/2011	9:46:56 AM	H2 MFC set to  0.000000
10/16/2011	9:46:56 AM	BCl3 MFC set to  0.000000
10/16/2011	9:46:56 AM	PHl3 MFC set to  0.000000
10/16/2011	9:46:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:46:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:46:57 AM	Tube furnace set to 150
10/16/2011	9:47:27 AM	H2 valve closed
10/16/2011	9:47:27 AM	BCl3 valve closed
10/16/2011	9:47:27 AM	PH3 valve closed
10/16/2011	9:47:27 AM	SiCl4 pre valve closed
10/16/2011	9:47:27 AM	SiCl4 post valve closed
10/16/2011	9:47:27 AM	Bypass valve closed
10/16/2011	9:47:27 AM	Bubbler valve closed
10/16/2011	9:47:27 AM	Helium valve opened
10/16/2011	9:47:27 AM	Main Vac valve opened
10/16/2011	9:47:27 AM	Helium MFC set to  20.000000
10/16/2011	9:47:27 AM	H2 MFC set to  0.000000
10/16/2011	9:47:27 AM	BCl3 MFC set to  0.000000
10/16/2011	9:47:27 AM	PHl3 MFC set to  0.000000
10/16/2011	9:47:27 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:47:27 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:47:27 AM	Tube furnace set to 150
10/16/2011	9:47:57 AM	Helium valve closed
10/16/2011	9:47:57 AM	H2 valve closed
10/16/2011	9:47:57 AM	BCl3 valve closed
10/16/2011	9:47:57 AM	PH3 valve closed
10/16/2011	9:47:57 AM	SiCl4 pre valve closed
10/16/2011	9:47:57 AM	SiCl4 post valve closed
10/16/2011	9:47:57 AM	Bypass valve closed
10/16/2011	9:47:57 AM	Bubbler valve closed
10/16/2011	9:47:57 AM	Main Vac valve opened
10/16/2011	9:47:57 AM	Helium MFC set to  0.000000
10/16/2011	9:47:57 AM	H2 MFC set to  0.000000
10/16/2011	9:47:57 AM	BCl3 MFC set to  0.000000
10/16/2011	9:47:57 AM	PHl3 MFC set to  0.000000
10/16/2011	9:47:57 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:47:57 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:47:57 AM	Tube furnace set to 150
10/16/2011	9:48:27 AM	H2 valve closed
10/16/2011	9:48:27 AM	BCl3 valve closed
10/16/2011	9:48:27 AM	PH3 valve closed
10/16/2011	9:48:27 AM	SiCl4 pre valve closed
10/16/2011	9:48:27 AM	SiCl4 post valve closed
10/16/2011	9:48:27 AM	Bypass valve closed
10/16/2011	9:48:27 AM	Bubbler valve closed
10/16/2011	9:48:27 AM	Helium valve opened
10/16/2011	9:48:27 AM	Main Vac valve opened
10/16/2011	9:48:27 AM	Helium MFC set to  20.000000
10/16/2011	9:48:27 AM	H2 MFC set to  0.000000
10/16/2011	9:48:27 AM	BCl3 MFC set to  0.000000
10/16/2011	9:48:27 AM	PHl3 MFC set to  0.000000
10/16/2011	9:48:27 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:48:27 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:48:27 AM	Tube furnace set to 150
10/16/2011	9:48:57 AM	Helium valve closed
10/16/2011	9:48:57 AM	H2 valve closed
10/16/2011	9:48:57 AM	BCl3 valve closed
10/16/2011	9:48:57 AM	PH3 valve closed
10/16/2011	9:48:57 AM	SiCl4 pre valve closed
10/16/2011	9:48:57 AM	SiCl4 post valve closed
10/16/2011	9:48:57 AM	Bypass valve closed
10/16/2011	9:48:57 AM	Bubbler valve closed
10/16/2011	9:48:57 AM	Main Vac valve opened
10/16/2011	9:48:57 AM	Helium MFC set to  0.000000
10/16/2011	9:48:57 AM	H2 MFC set to  0.000000
10/16/2011	9:48:57 AM	BCl3 MFC set to  0.000000
10/16/2011	9:48:57 AM	PHl3 MFC set to  0.000000
10/16/2011	9:48:57 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:48:57 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:48:58 AM	Tube furnace set to 150
10/16/2011	9:49:28 AM	H2 valve closed
10/16/2011	9:49:28 AM	BCl3 valve closed
10/16/2011	9:49:28 AM	PH3 valve closed
10/16/2011	9:49:28 AM	SiCl4 pre valve closed
10/16/2011	9:49:28 AM	SiCl4 post valve closed
10/16/2011	9:49:28 AM	Bypass valve closed
10/16/2011	9:49:28 AM	Bubbler valve closed
10/16/2011	9:49:28 AM	Helium valve opened
10/16/2011	9:49:28 AM	Main Vac valve opened
10/16/2011	9:49:28 AM	Helium MFC set to  20.000000
10/16/2011	9:49:28 AM	H2 MFC set to  0.000000
10/16/2011	9:49:28 AM	BCl3 MFC set to  0.000000
10/16/2011	9:49:28 AM	PHl3 MFC set to  0.000000
10/16/2011	9:49:28 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:49:28 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:49:28 AM	Tube furnace set to 150
10/16/2011	9:49:58 AM	Helium valve closed
10/16/2011	9:49:58 AM	H2 valve closed
10/16/2011	9:49:58 AM	BCl3 valve closed
10/16/2011	9:49:58 AM	PH3 valve closed
10/16/2011	9:49:58 AM	SiCl4 pre valve closed
10/16/2011	9:49:58 AM	SiCl4 post valve closed
10/16/2011	9:49:58 AM	Bypass valve closed
10/16/2011	9:49:58 AM	Bubbler valve closed
10/16/2011	9:49:58 AM	Main Vac valve opened
10/16/2011	9:49:58 AM	Helium MFC set to  0.000000
10/16/2011	9:49:58 AM	H2 MFC set to  0.000000
10/16/2011	9:49:58 AM	BCl3 MFC set to  0.000000
10/16/2011	9:49:58 AM	PHl3 MFC set to  0.000000
10/16/2011	9:49:58 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:49:58 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:49:58 AM	Tube furnace set to 150
10/16/2011	9:50:28 AM	H2 valve closed
10/16/2011	9:50:28 AM	BCl3 valve closed
10/16/2011	9:50:28 AM	PH3 valve closed
10/16/2011	9:50:28 AM	SiCl4 pre valve closed
10/16/2011	9:50:28 AM	SiCl4 post valve closed
10/16/2011	9:50:28 AM	Bypass valve closed
10/16/2011	9:50:28 AM	Bubbler valve closed
10/16/2011	9:50:28 AM	Helium valve opened
10/16/2011	9:50:28 AM	Main Vac valve opened
10/16/2011	9:50:28 AM	Helium MFC set to  20.000000
10/16/2011	9:50:28 AM	H2 MFC set to  0.000000
10/16/2011	9:50:28 AM	BCl3 MFC set to  0.000000
10/16/2011	9:50:28 AM	PHl3 MFC set to  0.000000
10/16/2011	9:50:28 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:50:28 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:50:28 AM	Tube furnace set to 150
10/16/2011	9:50:58 AM	Helium valve closed
10/16/2011	9:50:58 AM	H2 valve closed
10/16/2011	9:50:58 AM	BCl3 valve closed
10/16/2011	9:50:58 AM	PH3 valve closed
10/16/2011	9:50:58 AM	SiCl4 pre valve closed
10/16/2011	9:50:58 AM	SiCl4 post valve closed
10/16/2011	9:50:58 AM	Bypass valve closed
10/16/2011	9:50:58 AM	Bubbler valve closed
10/16/2011	9:50:58 AM	Main Vac valve opened
10/16/2011	9:50:58 AM	Helium MFC set to  0.000000
10/16/2011	9:50:58 AM	H2 MFC set to  0.000000
10/16/2011	9:50:58 AM	BCl3 MFC set to  0.000000
10/16/2011	9:50:58 AM	PHl3 MFC set to  0.000000
10/16/2011	9:50:58 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:50:58 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:50:58 AM	Tube furnace set to 150
10/16/2011	9:51:28 AM	H2 valve closed
10/16/2011	9:51:28 AM	BCl3 valve closed
10/16/2011	9:51:28 AM	PH3 valve closed
10/16/2011	9:51:28 AM	SiCl4 pre valve closed
10/16/2011	9:51:28 AM	SiCl4 post valve closed
10/16/2011	9:51:28 AM	Bypass valve closed
10/16/2011	9:51:28 AM	Bubbler valve closed
10/16/2011	9:51:28 AM	Helium valve opened
10/16/2011	9:51:28 AM	Main Vac valve opened
10/16/2011	9:51:28 AM	Helium MFC set to  20.000000
10/16/2011	9:51:28 AM	H2 MFC set to  0.000000
10/16/2011	9:51:28 AM	BCl3 MFC set to  0.000000
10/16/2011	9:51:28 AM	PHl3 MFC set to  0.000000
10/16/2011	9:51:28 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:51:28 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:51:29 AM	Tube furnace set to 150
10/16/2011	9:51:59 AM	Helium valve closed
10/16/2011	9:51:59 AM	H2 valve closed
10/16/2011	9:51:59 AM	BCl3 valve closed
10/16/2011	9:51:59 AM	PH3 valve closed
10/16/2011	9:51:59 AM	SiCl4 pre valve closed
10/16/2011	9:51:59 AM	SiCl4 post valve closed
10/16/2011	9:51:59 AM	Bypass valve closed
10/16/2011	9:51:59 AM	Bubbler valve closed
10/16/2011	9:51:59 AM	Main Vac valve opened
10/16/2011	9:51:59 AM	Helium MFC set to  0.000000
10/16/2011	9:51:59 AM	H2 MFC set to  0.000000
10/16/2011	9:51:59 AM	BCl3 MFC set to  0.000000
10/16/2011	9:51:59 AM	PHl3 MFC set to  0.000000
10/16/2011	9:51:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:51:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:51:59 AM	Tube furnace set to 150
10/16/2011	9:52:29 AM	H2 valve closed
10/16/2011	9:52:29 AM	BCl3 valve closed
10/16/2011	9:52:29 AM	PH3 valve closed
10/16/2011	9:52:29 AM	SiCl4 pre valve closed
10/16/2011	9:52:29 AM	SiCl4 post valve closed
10/16/2011	9:52:29 AM	Bypass valve closed
10/16/2011	9:52:29 AM	Bubbler valve closed
10/16/2011	9:52:29 AM	Helium valve opened
10/16/2011	9:52:29 AM	Main Vac valve opened
10/16/2011	9:52:29 AM	Helium MFC set to  20.000000
10/16/2011	9:52:29 AM	H2 MFC set to  0.000000
10/16/2011	9:52:29 AM	BCl3 MFC set to  0.000000
10/16/2011	9:52:29 AM	PHl3 MFC set to  0.000000
10/16/2011	9:52:29 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:52:29 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:52:29 AM	Tube furnace set to 150
10/16/2011	9:52:59 AM	Helium valve closed
10/16/2011	9:52:59 AM	H2 valve closed
10/16/2011	9:52:59 AM	BCl3 valve closed
10/16/2011	9:52:59 AM	PH3 valve closed
10/16/2011	9:52:59 AM	SiCl4 pre valve closed
10/16/2011	9:52:59 AM	SiCl4 post valve closed
10/16/2011	9:52:59 AM	Bypass valve closed
10/16/2011	9:52:59 AM	Bubbler valve closed
10/16/2011	9:52:59 AM	Main Vac valve opened
10/16/2011	9:52:59 AM	Helium MFC set to  0.000000
10/16/2011	9:52:59 AM	H2 MFC set to  0.000000
10/16/2011	9:52:59 AM	BCl3 MFC set to  0.000000
10/16/2011	9:52:59 AM	PHl3 MFC set to  0.000000
10/16/2011	9:52:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	9:52:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	9:52:59 AM	Tube furnace set to 150
10/16/2011	9:53:00 AM	Run finished at 9:53 AM
10/16/2011	10:00:31 AM	Main Vac valve closed
10/16/2011	10:01:19 AM	Main Vac valve opened
10/16/2011	10:01:50 AM	Recipe started at 10:01 AM
10/16/2011	10:01:50 AM	Helium valve closed
10/16/2011	10:01:50 AM	H2 valve closed
10/16/2011	10:01:50 AM	BCl3 valve closed
10/16/2011	10:01:50 AM	PH3 valve closed
10/16/2011	10:01:50 AM	SiCl4 pre valve closed
10/16/2011	10:01:50 AM	SiCl4 post valve closed
10/16/2011	10:01:50 AM	Main Vac valve closed
10/16/2011	10:01:50 AM	Bypass valve closed
10/16/2011	10:01:50 AM	Bubbler valve closed
10/16/2011	10:01:50 AM	Helium MFC set to  0.000000
10/16/2011	10:01:50 AM	H2 MFC set to  0.000000
10/16/2011	10:01:50 AM	BCl3 MFC set to  0.000000
10/16/2011	10:01:50 AM	PHl3 MFC set to  0.000000
10/16/2011	10:01:50 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:01:50 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:01:50 AM	Tube furnace set to 0
10/16/2011	10:01:53 AM	Helium valve closed
10/16/2011	10:01:53 AM	BCl3 valve closed
10/16/2011	10:01:53 AM	PH3 valve closed
10/16/2011	10:01:53 AM	SiCl4 pre valve closed
10/16/2011	10:01:53 AM	SiCl4 post valve closed
10/16/2011	10:01:53 AM	Main Vac valve closed
10/16/2011	10:01:53 AM	Bypass valve closed
10/16/2011	10:01:53 AM	Bubbler valve closed
10/16/2011	10:01:53 AM	H2 valve opened
10/16/2011	10:01:53 AM	Helium MFC set to  0.000000
10/16/2011	10:01:53 AM	H2 MFC set to  500.000000
10/16/2011	10:01:53 AM	BCl3 MFC set to  0.000000
10/16/2011	10:01:53 AM	PHl3 MFC set to  0.000000
10/16/2011	10:01:53 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:01:53 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:01:53 AM	Tube furnace set to 0
10/16/2011	10:02:57 AM	Helium valve closed
10/16/2011	10:02:57 AM	BCl3 valve closed
10/16/2011	10:02:57 AM	PH3 valve closed
10/16/2011	10:02:57 AM	SiCl4 pre valve closed
10/16/2011	10:02:57 AM	SiCl4 post valve closed
10/16/2011	10:02:57 AM	Main Vac valve closed
10/16/2011	10:02:57 AM	Bypass valve closed
10/16/2011	10:02:57 AM	H2 valve opened
10/16/2011	10:02:57 AM	Bubbler valve opened
10/16/2011	10:02:57 AM	Helium MFC set to  0.000000
10/16/2011	10:02:57 AM	H2 MFC set to  500.000000
10/16/2011	10:02:57 AM	BCl3 MFC set to  0.000000
10/16/2011	10:02:57 AM	PHl3 MFC set to  0.000000
10/16/2011	10:02:57 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:02:57 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:02:58 AM	Tube furnace set to 0
10/16/2011	10:02:59 AM	Helium valve closed
10/16/2011	10:02:59 AM	BCl3 valve closed
10/16/2011	10:02:59 AM	PH3 valve closed
10/16/2011	10:02:59 AM	SiCl4 pre valve closed
10/16/2011	10:02:59 AM	SiCl4 post valve closed
10/16/2011	10:02:59 AM	Main Vac valve closed
10/16/2011	10:02:59 AM	Bypass valve closed
10/16/2011	10:02:59 AM	H2 valve opened
10/16/2011	10:02:59 AM	Bubbler valve opened
10/16/2011	10:02:59 AM	Helium MFC set to  0.000000
10/16/2011	10:02:59 AM	H2 MFC set to  500.000000
10/16/2011	10:02:59 AM	BCl3 MFC set to  0.000000
10/16/2011	10:02:59 AM	PHl3 MFC set to  0.000000
10/16/2011	10:02:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:02:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:02:59 AM	Tube furnace set to 1000
10/16/2011	10:22:59 AM	Helium valve closed
10/16/2011	10:22:59 AM	PH3 valve closed
10/16/2011	10:22:59 AM	Main Vac valve closed
10/16/2011	10:22:59 AM	Bypass valve closed
10/16/2011	10:22:59 AM	H2 valve opened
10/16/2011	10:22:59 AM	BCl3 valve opened
10/16/2011	10:22:59 AM	SiCl4 pre valve opened
10/16/2011	10:22:59 AM	SiCl4 post valve opened
10/16/2011	10:22:59 AM	Bubbler valve opened
10/16/2011	10:22:59 AM	Helium MFC set to  0.000000
10/16/2011	10:22:59 AM	H2 MFC set to  500.000000
10/16/2011	10:22:59 AM	BCl3 MFC set to  2.500000
10/16/2011	10:22:59 AM	PHl3 MFC set to  0.000000
10/16/2011	10:22:59 AM	SiCl4 MFC set to  50.000000
10/16/2011	10:22:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:22:59 AM	Tube furnace set to 1000
10/16/2011	10:37:59 AM	Helium valve closed
10/16/2011	10:37:59 AM	BCl3 valve closed
10/16/2011	10:37:59 AM	PH3 valve closed
10/16/2011	10:37:59 AM	SiCl4 pre valve closed
10/16/2011	10:37:59 AM	SiCl4 post valve closed
10/16/2011	10:37:59 AM	Main Vac valve closed
10/16/2011	10:37:59 AM	Bypass valve closed
10/16/2011	10:37:59 AM	H2 valve opened
10/16/2011	10:37:59 AM	Bubbler valve opened
10/16/2011	10:37:59 AM	Helium MFC set to  0.000000
10/16/2011	10:37:59 AM	H2 MFC set to  500.000000
10/16/2011	10:37:59 AM	BCl3 MFC set to  0.000000
10/16/2011	10:37:59 AM	PHl3 MFC set to  0.000000
10/16/2011	10:37:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:37:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:37:59 AM	Tube furnace set to 750
10/16/2011	10:42:59 AM	H2 valve closed
10/16/2011	10:42:59 AM	BCl3 valve closed
10/16/2011	10:42:59 AM	PH3 valve closed
10/16/2011	10:42:59 AM	SiCl4 pre valve closed
10/16/2011	10:42:59 AM	SiCl4 post valve closed
10/16/2011	10:42:59 AM	Main Vac valve closed
10/16/2011	10:42:59 AM	Bypass valve closed
10/16/2011	10:42:59 AM	Helium valve opened
10/16/2011	10:42:59 AM	Bubbler valve opened
10/16/2011	10:42:59 AM	Helium MFC set to  500.000000
10/16/2011	10:42:59 AM	H2 MFC set to  0.000000
10/16/2011	10:42:59 AM	BCl3 MFC set to  0.000000
10/16/2011	10:42:59 AM	PHl3 MFC set to  0.000000
10/16/2011	10:42:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	10:42:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	10:42:59 AM	Tube furnace set to 0
10/16/2011	11:02:59 AM	Helium valve closed
10/16/2011	11:02:59 AM	H2 valve closed
10/16/2011	11:02:59 AM	BCl3 valve closed
10/16/2011	11:02:59 AM	PH3 valve closed
10/16/2011	11:02:59 AM	SiCl4 pre valve closed
10/16/2011	11:02:59 AM	SiCl4 post valve closed
10/16/2011	11:02:59 AM	Main Vac valve closed
10/16/2011	11:02:59 AM	Bypass valve closed
10/16/2011	11:02:59 AM	Bubbler valve closed
10/16/2011	11:02:59 AM	Helium MFC set to  0.000000
10/16/2011	11:02:59 AM	H2 MFC set to  0.000000
10/16/2011	11:02:59 AM	BCl3 MFC set to  0.000000
10/16/2011	11:02:59 AM	PHl3 MFC set to  0.000000
10/16/2011	11:02:59 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:02:59 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:02:59 AM	Tube furnace set to 0
10/16/2011	11:03:00 AM	Run finished at 11:03 AM
10/16/2011	11:16:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2011	11:16:51 AM	Recipe started at 11:16 AM
10/16/2011	11:16:51 AM	Helium valve closed
10/16/2011	11:16:51 AM	H2 valve closed
10/16/2011	11:16:51 AM	BCl3 valve closed
10/16/2011	11:16:51 AM	PH3 valve closed
10/16/2011	11:16:51 AM	SiCl4 pre valve closed
10/16/2011	11:16:51 AM	SiCl4 post valve closed
10/16/2011	11:16:51 AM	Main Vac valve closed
10/16/2011	11:16:51 AM	Bubbler valve closed
10/16/2011	11:16:51 AM	Bypass valve opened
10/16/2011	11:16:51 AM	Helium MFC set to  0.000000
10/16/2011	11:16:51 AM	H2 MFC set to  0.000000
10/16/2011	11:16:51 AM	BCl3 MFC set to  0.000000
10/16/2011	11:16:51 AM	PHl3 MFC set to  0.000000
10/16/2011	11:16:51 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:16:51 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:16:51 AM	Tube furnace set to 0
10/16/2011	11:18:01 AM	Helium valve closed
10/16/2011	11:18:01 AM	H2 valve closed
10/16/2011	11:18:01 AM	BCl3 valve closed
10/16/2011	11:18:01 AM	PH3 valve closed
10/16/2011	11:18:01 AM	SiCl4 pre valve closed
10/16/2011	11:18:01 AM	SiCl4 post valve closed
10/16/2011	11:18:01 AM	Main Vac valve closed
10/16/2011	11:18:01 AM	Bubbler valve closed
10/16/2011	11:18:01 AM	Bypass valve opened
10/16/2011	11:18:01 AM	Helium MFC set to  0.000000
10/16/2011	11:18:01 AM	H2 MFC set to  0.000000
10/16/2011	11:18:01 AM	BCl3 MFC set to  0.000000
10/16/2011	11:18:01 AM	PHl3 MFC set to  0.000000
10/16/2011	11:18:01 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:18:01 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:18:01 AM	Tube furnace set to 0
10/16/2011	11:19:01 AM	Helium valve closed
10/16/2011	11:19:01 AM	H2 valve closed
10/16/2011	11:19:01 AM	BCl3 valve closed
10/16/2011	11:19:01 AM	PH3 valve closed
10/16/2011	11:19:01 AM	SiCl4 pre valve closed
10/16/2011	11:19:01 AM	SiCl4 post valve closed
10/16/2011	11:19:01 AM	Bypass valve closed
10/16/2011	11:19:01 AM	Bubbler valve closed
10/16/2011	11:19:01 AM	Main Vac valve opened
10/16/2011	11:19:01 AM	Helium MFC set to  0.000000
10/16/2011	11:19:01 AM	H2 MFC set to  0.000000
10/16/2011	11:19:01 AM	BCl3 MFC set to  0.000000
10/16/2011	11:19:01 AM	PHl3 MFC set to  0.000000
10/16/2011	11:19:01 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:19:01 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:19:02 AM	Tube furnace set to 0
10/16/2011	11:19:03 AM	Run finished at 11:19 AM
10/16/2011	11:19:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2011	11:30:48 AM	Recipe started at 11:30 AM
10/16/2011	11:30:48 AM	Helium valve closed
10/16/2011	11:30:48 AM	H2 valve closed
10/16/2011	11:30:48 AM	BCl3 valve closed
10/16/2011	11:30:48 AM	PH3 valve closed
10/16/2011	11:30:48 AM	SiCl4 pre valve closed
10/16/2011	11:30:48 AM	SiCl4 post valve closed
10/16/2011	11:30:48 AM	Bypass valve closed
10/16/2011	11:30:48 AM	Bubbler valve closed
10/16/2011	11:30:48 AM	Main Vac valve opened
10/16/2011	11:30:48 AM	Helium MFC set to  0.000000
10/16/2011	11:30:48 AM	H2 MFC set to  0.000000
10/16/2011	11:30:48 AM	BCl3 MFC set to  0.000000
10/16/2011	11:30:48 AM	PHl3 MFC set to  0.000000
10/16/2011	11:30:48 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:30:48 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:30:49 AM	Tube furnace set to 150
10/16/2011	11:30:54 AM	H2 valve closed
10/16/2011	11:30:54 AM	BCl3 valve closed
10/16/2011	11:30:54 AM	PH3 valve closed
10/16/2011	11:30:54 AM	SiCl4 pre valve closed
10/16/2011	11:30:54 AM	SiCl4 post valve closed
10/16/2011	11:30:54 AM	Bypass valve closed
10/16/2011	11:30:54 AM	Bubbler valve closed
10/16/2011	11:30:54 AM	Helium valve opened
10/16/2011	11:30:54 AM	Main Vac valve opened
10/16/2011	11:30:54 AM	Helium MFC set to  20.000000
10/16/2011	11:30:54 AM	H2 MFC set to  0.000000
10/16/2011	11:30:54 AM	BCl3 MFC set to  0.000000
10/16/2011	11:30:54 AM	PHl3 MFC set to  0.000000
10/16/2011	11:30:54 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:30:54 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:30:54 AM	Tube furnace set to 150
10/16/2011	11:31:24 AM	Helium valve closed
10/16/2011	11:31:24 AM	H2 valve closed
10/16/2011	11:31:24 AM	BCl3 valve closed
10/16/2011	11:31:24 AM	PH3 valve closed
10/16/2011	11:31:24 AM	SiCl4 pre valve closed
10/16/2011	11:31:24 AM	SiCl4 post valve closed
10/16/2011	11:31:24 AM	Bypass valve closed
10/16/2011	11:31:24 AM	Bubbler valve closed
10/16/2011	11:31:24 AM	Main Vac valve opened
10/16/2011	11:31:24 AM	Helium MFC set to  0.000000
10/16/2011	11:31:24 AM	H2 MFC set to  0.000000
10/16/2011	11:31:24 AM	BCl3 MFC set to  0.000000
10/16/2011	11:31:24 AM	PHl3 MFC set to  0.000000
10/16/2011	11:31:24 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:31:24 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:31:24 AM	Tube furnace set to 150
10/16/2011	11:31:54 AM	H2 valve closed
10/16/2011	11:31:54 AM	BCl3 valve closed
10/16/2011	11:31:54 AM	PH3 valve closed
10/16/2011	11:31:54 AM	SiCl4 pre valve closed
10/16/2011	11:31:54 AM	SiCl4 post valve closed
10/16/2011	11:31:54 AM	Bypass valve closed
10/16/2011	11:31:54 AM	Bubbler valve closed
10/16/2011	11:31:54 AM	Helium valve opened
10/16/2011	11:31:54 AM	Main Vac valve opened
10/16/2011	11:31:54 AM	Helium MFC set to  20.000000
10/16/2011	11:31:54 AM	H2 MFC set to  0.000000
10/16/2011	11:31:54 AM	BCl3 MFC set to  0.000000
10/16/2011	11:31:54 AM	PHl3 MFC set to  0.000000
10/16/2011	11:31:54 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:31:54 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:31:54 AM	Tube furnace set to 150
10/16/2011	11:32:24 AM	Helium valve closed
10/16/2011	11:32:24 AM	H2 valve closed
10/16/2011	11:32:24 AM	BCl3 valve closed
10/16/2011	11:32:24 AM	PH3 valve closed
10/16/2011	11:32:24 AM	SiCl4 pre valve closed
10/16/2011	11:32:24 AM	SiCl4 post valve closed
10/16/2011	11:32:24 AM	Bypass valve closed
10/16/2011	11:32:24 AM	Bubbler valve closed
10/16/2011	11:32:24 AM	Main Vac valve opened
10/16/2011	11:32:24 AM	Helium MFC set to  0.000000
10/16/2011	11:32:24 AM	H2 MFC set to  0.000000
10/16/2011	11:32:24 AM	BCl3 MFC set to  0.000000
10/16/2011	11:32:24 AM	PHl3 MFC set to  0.000000
10/16/2011	11:32:24 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:32:24 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:32:24 AM	Tube furnace set to 150
10/16/2011	11:32:54 AM	H2 valve closed
10/16/2011	11:32:54 AM	BCl3 valve closed
10/16/2011	11:32:54 AM	PH3 valve closed
10/16/2011	11:32:54 AM	SiCl4 pre valve closed
10/16/2011	11:32:54 AM	SiCl4 post valve closed
10/16/2011	11:32:54 AM	Bypass valve closed
10/16/2011	11:32:54 AM	Bubbler valve closed
10/16/2011	11:32:54 AM	Helium valve opened
10/16/2011	11:32:54 AM	Main Vac valve opened
10/16/2011	11:32:54 AM	Helium MFC set to  20.000000
10/16/2011	11:32:54 AM	H2 MFC set to  0.000000
10/16/2011	11:32:54 AM	BCl3 MFC set to  0.000000
10/16/2011	11:32:54 AM	PHl3 MFC set to  0.000000
10/16/2011	11:32:54 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:32:54 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:32:55 AM	Tube furnace set to 150
10/16/2011	11:33:25 AM	Helium valve closed
10/16/2011	11:33:25 AM	H2 valve closed
10/16/2011	11:33:25 AM	BCl3 valve closed
10/16/2011	11:33:25 AM	PH3 valve closed
10/16/2011	11:33:25 AM	SiCl4 pre valve closed
10/16/2011	11:33:25 AM	SiCl4 post valve closed
10/16/2011	11:33:25 AM	Bypass valve closed
10/16/2011	11:33:25 AM	Bubbler valve closed
10/16/2011	11:33:25 AM	Main Vac valve opened
10/16/2011	11:33:25 AM	Helium MFC set to  0.000000
10/16/2011	11:33:25 AM	H2 MFC set to  0.000000
10/16/2011	11:33:25 AM	BCl3 MFC set to  0.000000
10/16/2011	11:33:25 AM	PHl3 MFC set to  0.000000
10/16/2011	11:33:25 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:33:25 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:33:25 AM	Tube furnace set to 150
10/16/2011	11:33:55 AM	H2 valve closed
10/16/2011	11:33:55 AM	BCl3 valve closed
10/16/2011	11:33:55 AM	PH3 valve closed
10/16/2011	11:33:55 AM	SiCl4 pre valve closed
10/16/2011	11:33:55 AM	SiCl4 post valve closed
10/16/2011	11:33:55 AM	Bypass valve closed
10/16/2011	11:33:55 AM	Bubbler valve closed
10/16/2011	11:33:55 AM	Helium valve opened
10/16/2011	11:33:55 AM	Main Vac valve opened
10/16/2011	11:33:55 AM	Helium MFC set to  20.000000
10/16/2011	11:33:55 AM	H2 MFC set to  0.000000
10/16/2011	11:33:55 AM	BCl3 MFC set to  0.000000
10/16/2011	11:33:55 AM	PHl3 MFC set to  0.000000
10/16/2011	11:33:55 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:33:55 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:33:55 AM	Tube furnace set to 150
10/16/2011	11:34:25 AM	Helium valve closed
10/16/2011	11:34:25 AM	H2 valve closed
10/16/2011	11:34:25 AM	BCl3 valve closed
10/16/2011	11:34:25 AM	PH3 valve closed
10/16/2011	11:34:25 AM	SiCl4 pre valve closed
10/16/2011	11:34:25 AM	SiCl4 post valve closed
10/16/2011	11:34:25 AM	Bypass valve closed
10/16/2011	11:34:25 AM	Bubbler valve closed
10/16/2011	11:34:25 AM	Main Vac valve opened
10/16/2011	11:34:25 AM	Helium MFC set to  0.000000
10/16/2011	11:34:25 AM	H2 MFC set to  0.000000
10/16/2011	11:34:25 AM	BCl3 MFC set to  0.000000
10/16/2011	11:34:25 AM	PHl3 MFC set to  0.000000
10/16/2011	11:34:25 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:34:25 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:34:25 AM	Tube furnace set to 150
10/16/2011	11:34:55 AM	H2 valve closed
10/16/2011	11:34:55 AM	BCl3 valve closed
10/16/2011	11:34:55 AM	PH3 valve closed
10/16/2011	11:34:55 AM	SiCl4 pre valve closed
10/16/2011	11:34:55 AM	SiCl4 post valve closed
10/16/2011	11:34:55 AM	Bypass valve closed
10/16/2011	11:34:55 AM	Bubbler valve closed
10/16/2011	11:34:55 AM	Helium valve opened
10/16/2011	11:34:55 AM	Main Vac valve opened
10/16/2011	11:34:55 AM	Helium MFC set to  20.000000
10/16/2011	11:34:55 AM	H2 MFC set to  0.000000
10/16/2011	11:34:55 AM	BCl3 MFC set to  0.000000
10/16/2011	11:34:55 AM	PHl3 MFC set to  0.000000
10/16/2011	11:34:55 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:34:55 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:34:55 AM	Tube furnace set to 150
10/16/2011	11:35:25 AM	Helium valve closed
10/16/2011	11:35:25 AM	H2 valve closed
10/16/2011	11:35:25 AM	BCl3 valve closed
10/16/2011	11:35:25 AM	PH3 valve closed
10/16/2011	11:35:25 AM	SiCl4 pre valve closed
10/16/2011	11:35:25 AM	SiCl4 post valve closed
10/16/2011	11:35:25 AM	Bypass valve closed
10/16/2011	11:35:25 AM	Bubbler valve closed
10/16/2011	11:35:25 AM	Main Vac valve opened
10/16/2011	11:35:25 AM	Helium MFC set to  0.000000
10/16/2011	11:35:25 AM	H2 MFC set to  0.000000
10/16/2011	11:35:25 AM	BCl3 MFC set to  0.000000
10/16/2011	11:35:25 AM	PHl3 MFC set to  0.000000
10/16/2011	11:35:25 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:35:25 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:35:26 AM	Tube furnace set to 150
10/16/2011	11:35:56 AM	H2 valve closed
10/16/2011	11:35:56 AM	BCl3 valve closed
10/16/2011	11:35:56 AM	PH3 valve closed
10/16/2011	11:35:56 AM	SiCl4 pre valve closed
10/16/2011	11:35:56 AM	SiCl4 post valve closed
10/16/2011	11:35:56 AM	Bypass valve closed
10/16/2011	11:35:56 AM	Bubbler valve closed
10/16/2011	11:35:56 AM	Helium valve opened
10/16/2011	11:35:56 AM	Main Vac valve opened
10/16/2011	11:35:56 AM	Helium MFC set to  20.000000
10/16/2011	11:35:56 AM	H2 MFC set to  0.000000
10/16/2011	11:35:56 AM	BCl3 MFC set to  0.000000
10/16/2011	11:35:56 AM	PHl3 MFC set to  0.000000
10/16/2011	11:35:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:35:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:35:56 AM	Tube furnace set to 150
10/16/2011	11:36:26 AM	Helium valve closed
10/16/2011	11:36:26 AM	H2 valve closed
10/16/2011	11:36:26 AM	BCl3 valve closed
10/16/2011	11:36:26 AM	PH3 valve closed
10/16/2011	11:36:26 AM	SiCl4 pre valve closed
10/16/2011	11:36:26 AM	SiCl4 post valve closed
10/16/2011	11:36:26 AM	Bypass valve closed
10/16/2011	11:36:26 AM	Bubbler valve closed
10/16/2011	11:36:26 AM	Main Vac valve opened
10/16/2011	11:36:26 AM	Helium MFC set to  0.000000
10/16/2011	11:36:26 AM	H2 MFC set to  0.000000
10/16/2011	11:36:26 AM	BCl3 MFC set to  0.000000
10/16/2011	11:36:26 AM	PHl3 MFC set to  0.000000
10/16/2011	11:36:26 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:36:26 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:36:26 AM	Tube furnace set to 150
10/16/2011	11:36:56 AM	H2 valve closed
10/16/2011	11:36:56 AM	BCl3 valve closed
10/16/2011	11:36:56 AM	PH3 valve closed
10/16/2011	11:36:56 AM	SiCl4 pre valve closed
10/16/2011	11:36:56 AM	SiCl4 post valve closed
10/16/2011	11:36:56 AM	Bypass valve closed
10/16/2011	11:36:56 AM	Bubbler valve closed
10/16/2011	11:36:56 AM	Helium valve opened
10/16/2011	11:36:56 AM	Main Vac valve opened
10/16/2011	11:36:56 AM	Helium MFC set to  20.000000
10/16/2011	11:36:56 AM	H2 MFC set to  0.000000
10/16/2011	11:36:56 AM	BCl3 MFC set to  0.000000
10/16/2011	11:36:56 AM	PHl3 MFC set to  0.000000
10/16/2011	11:36:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:36:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:36:56 AM	Tube furnace set to 150
10/16/2011	11:37:26 AM	Helium valve closed
10/16/2011	11:37:26 AM	H2 valve closed
10/16/2011	11:37:26 AM	BCl3 valve closed
10/16/2011	11:37:26 AM	PH3 valve closed
10/16/2011	11:37:26 AM	SiCl4 pre valve closed
10/16/2011	11:37:26 AM	SiCl4 post valve closed
10/16/2011	11:37:26 AM	Bypass valve closed
10/16/2011	11:37:26 AM	Bubbler valve closed
10/16/2011	11:37:26 AM	Main Vac valve opened
10/16/2011	11:37:26 AM	Helium MFC set to  0.000000
10/16/2011	11:37:26 AM	H2 MFC set to  0.000000
10/16/2011	11:37:26 AM	BCl3 MFC set to  0.000000
10/16/2011	11:37:26 AM	PHl3 MFC set to  0.000000
10/16/2011	11:37:26 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:37:26 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:37:26 AM	Tube furnace set to 150
10/16/2011	11:37:56 AM	H2 valve closed
10/16/2011	11:37:56 AM	BCl3 valve closed
10/16/2011	11:37:56 AM	PH3 valve closed
10/16/2011	11:37:56 AM	SiCl4 pre valve closed
10/16/2011	11:37:56 AM	SiCl4 post valve closed
10/16/2011	11:37:56 AM	Bypass valve closed
10/16/2011	11:37:56 AM	Bubbler valve closed
10/16/2011	11:37:56 AM	Helium valve opened
10/16/2011	11:37:56 AM	Main Vac valve opened
10/16/2011	11:37:56 AM	Helium MFC set to  20.000000
10/16/2011	11:37:56 AM	H2 MFC set to  0.000000
10/16/2011	11:37:56 AM	BCl3 MFC set to  0.000000
10/16/2011	11:37:56 AM	PHl3 MFC set to  0.000000
10/16/2011	11:37:56 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:37:56 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:37:57 AM	Tube furnace set to 150
10/16/2011	11:38:27 AM	Helium valve closed
10/16/2011	11:38:27 AM	H2 valve closed
10/16/2011	11:38:27 AM	BCl3 valve closed
10/16/2011	11:38:27 AM	PH3 valve closed
10/16/2011	11:38:27 AM	SiCl4 pre valve closed
10/16/2011	11:38:27 AM	SiCl4 post valve closed
10/16/2011	11:38:27 AM	Bypass valve closed
10/16/2011	11:38:27 AM	Bubbler valve closed
10/16/2011	11:38:27 AM	Main Vac valve opened
10/16/2011	11:38:27 AM	Helium MFC set to  0.000000
10/16/2011	11:38:27 AM	H2 MFC set to  0.000000
10/16/2011	11:38:27 AM	BCl3 MFC set to  0.000000
10/16/2011	11:38:27 AM	PHl3 MFC set to  0.000000
10/16/2011	11:38:27 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:38:27 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:38:27 AM	Tube furnace set to 150
10/16/2011	11:38:57 AM	H2 valve closed
10/16/2011	11:38:57 AM	BCl3 valve closed
10/16/2011	11:38:57 AM	PH3 valve closed
10/16/2011	11:38:57 AM	SiCl4 pre valve closed
10/16/2011	11:38:57 AM	SiCl4 post valve closed
10/16/2011	11:38:57 AM	Bypass valve closed
10/16/2011	11:38:57 AM	Bubbler valve closed
10/16/2011	11:38:57 AM	Helium valve opened
10/16/2011	11:38:57 AM	Main Vac valve opened
10/16/2011	11:38:57 AM	Helium MFC set to  20.000000
10/16/2011	11:38:57 AM	H2 MFC set to  0.000000
10/16/2011	11:38:57 AM	BCl3 MFC set to  0.000000
10/16/2011	11:38:57 AM	PHl3 MFC set to  0.000000
10/16/2011	11:38:57 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:38:57 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:38:57 AM	Tube furnace set to 150
10/16/2011	11:39:27 AM	Helium valve closed
10/16/2011	11:39:27 AM	H2 valve closed
10/16/2011	11:39:27 AM	BCl3 valve closed
10/16/2011	11:39:27 AM	PH3 valve closed
10/16/2011	11:39:27 AM	SiCl4 pre valve closed
10/16/2011	11:39:27 AM	SiCl4 post valve closed
10/16/2011	11:39:27 AM	Bypass valve closed
10/16/2011	11:39:27 AM	Bubbler valve closed
10/16/2011	11:39:27 AM	Main Vac valve opened
10/16/2011	11:39:27 AM	Helium MFC set to  0.000000
10/16/2011	11:39:27 AM	H2 MFC set to  0.000000
10/16/2011	11:39:27 AM	BCl3 MFC set to  0.000000
10/16/2011	11:39:27 AM	PHl3 MFC set to  0.000000
10/16/2011	11:39:27 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:39:27 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:39:27 AM	Tube furnace set to 150
10/16/2011	11:39:57 AM	H2 valve closed
10/16/2011	11:39:57 AM	BCl3 valve closed
10/16/2011	11:39:57 AM	PH3 valve closed
10/16/2011	11:39:57 AM	SiCl4 pre valve closed
10/16/2011	11:39:57 AM	SiCl4 post valve closed
10/16/2011	11:39:57 AM	Bypass valve closed
10/16/2011	11:39:57 AM	Bubbler valve closed
10/16/2011	11:39:57 AM	Helium valve opened
10/16/2011	11:39:57 AM	Main Vac valve opened
10/16/2011	11:39:57 AM	Helium MFC set to  20.000000
10/16/2011	11:39:57 AM	H2 MFC set to  0.000000
10/16/2011	11:39:57 AM	BCl3 MFC set to  0.000000
10/16/2011	11:39:57 AM	PHl3 MFC set to  0.000000
10/16/2011	11:39:57 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:39:57 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:39:57 AM	Tube furnace set to 150
10/16/2011	11:40:27 AM	Helium valve closed
10/16/2011	11:40:27 AM	H2 valve closed
10/16/2011	11:40:27 AM	BCl3 valve closed
10/16/2011	11:40:27 AM	PH3 valve closed
10/16/2011	11:40:27 AM	SiCl4 pre valve closed
10/16/2011	11:40:27 AM	SiCl4 post valve closed
10/16/2011	11:40:27 AM	Bypass valve closed
10/16/2011	11:40:27 AM	Bubbler valve closed
10/16/2011	11:40:27 AM	Main Vac valve opened
10/16/2011	11:40:27 AM	Helium MFC set to  0.000000
10/16/2011	11:40:27 AM	H2 MFC set to  0.000000
10/16/2011	11:40:27 AM	BCl3 MFC set to  0.000000
10/16/2011	11:40:27 AM	PHl3 MFC set to  0.000000
10/16/2011	11:40:27 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:40:27 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:40:28 AM	Tube furnace set to 150
10/16/2011	11:40:29 AM	Run finished at 11:40 AM
10/16/2011	11:45:24 AM	Main Vac valve closed
10/16/2011	11:45:51 AM	Main Vac valve opened
10/16/2011	11:46:04 AM	Main Vac valve closed
10/16/2011	11:46:27 AM	Main Vac valve opened
10/16/2011	11:47:28 AM	Recipe started at 11:47 AM
10/16/2011	11:47:28 AM	Helium valve closed
10/16/2011	11:47:28 AM	H2 valve closed
10/16/2011	11:47:28 AM	BCl3 valve closed
10/16/2011	11:47:28 AM	PH3 valve closed
10/16/2011	11:47:28 AM	SiCl4 pre valve closed
10/16/2011	11:47:28 AM	SiCl4 post valve closed
10/16/2011	11:47:28 AM	Main Vac valve closed
10/16/2011	11:47:28 AM	Bypass valve closed
10/16/2011	11:47:28 AM	Bubbler valve closed
10/16/2011	11:47:28 AM	Helium MFC set to  0.000000
10/16/2011	11:47:28 AM	H2 MFC set to  0.000000
10/16/2011	11:47:28 AM	BCl3 MFC set to  0.000000
10/16/2011	11:47:28 AM	PHl3 MFC set to  0.000000
10/16/2011	11:47:28 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:47:28 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:47:28 AM	Tube furnace set to 0
10/16/2011	11:47:31 AM	Helium valve closed
10/16/2011	11:47:31 AM	BCl3 valve closed
10/16/2011	11:47:31 AM	PH3 valve closed
10/16/2011	11:47:31 AM	SiCl4 pre valve closed
10/16/2011	11:47:31 AM	SiCl4 post valve closed
10/16/2011	11:47:31 AM	Main Vac valve closed
10/16/2011	11:47:31 AM	Bypass valve closed
10/16/2011	11:47:31 AM	Bubbler valve closed
10/16/2011	11:47:31 AM	H2 valve opened
10/16/2011	11:47:31 AM	Helium MFC set to  0.000000
10/16/2011	11:47:31 AM	H2 MFC set to  500.000000
10/16/2011	11:47:31 AM	BCl3 MFC set to  0.000000
10/16/2011	11:47:31 AM	PHl3 MFC set to  0.000000
10/16/2011	11:47:31 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:47:31 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:47:31 AM	Tube furnace set to 0
10/16/2011	11:48:36 AM	Helium valve closed
10/16/2011	11:48:36 AM	BCl3 valve closed
10/16/2011	11:48:36 AM	PH3 valve closed
10/16/2011	11:48:36 AM	SiCl4 pre valve closed
10/16/2011	11:48:36 AM	SiCl4 post valve closed
10/16/2011	11:48:36 AM	Main Vac valve closed
10/16/2011	11:48:36 AM	Bypass valve closed
10/16/2011	11:48:36 AM	H2 valve opened
10/16/2011	11:48:36 AM	Bubbler valve opened
10/16/2011	11:48:36 AM	Helium MFC set to  0.000000
10/16/2011	11:48:36 AM	H2 MFC set to  500.000000
10/16/2011	11:48:36 AM	BCl3 MFC set to  0.000000
10/16/2011	11:48:36 AM	PHl3 MFC set to  0.000000
10/16/2011	11:48:36 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:48:36 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:48:36 AM	Tube furnace set to 0
10/16/2011	11:48:37 AM	Helium valve closed
10/16/2011	11:48:37 AM	BCl3 valve closed
10/16/2011	11:48:37 AM	PH3 valve closed
10/16/2011	11:48:37 AM	SiCl4 pre valve closed
10/16/2011	11:48:37 AM	SiCl4 post valve closed
10/16/2011	11:48:37 AM	Main Vac valve closed
10/16/2011	11:48:37 AM	Bypass valve closed
10/16/2011	11:48:37 AM	H2 valve opened
10/16/2011	11:48:37 AM	Bubbler valve opened
10/16/2011	11:48:37 AM	Helium MFC set to  0.000000
10/16/2011	11:48:37 AM	H2 MFC set to  500.000000
10/16/2011	11:48:37 AM	BCl3 MFC set to  0.000000
10/16/2011	11:48:37 AM	PHl3 MFC set to  0.000000
10/16/2011	11:48:37 AM	SiCl4 MFC set to  0.000000
10/16/2011	11:48:37 AM	Bypass solenoid MFC set to  0.000000
10/16/2011	11:48:37 AM	Tube furnace set to 1000
10/16/2011	12:08:37 PM	Helium valve closed
10/16/2011	12:08:37 PM	PH3 valve closed
10/16/2011	12:08:37 PM	Main Vac valve closed
10/16/2011	12:08:37 PM	Bypass valve closed
10/16/2011	12:08:37 PM	H2 valve opened
10/16/2011	12:08:37 PM	BCl3 valve opened
10/16/2011	12:08:37 PM	SiCl4 pre valve opened
10/16/2011	12:08:37 PM	SiCl4 post valve opened
10/16/2011	12:08:37 PM	Bubbler valve opened
10/16/2011	12:08:37 PM	Helium MFC set to  0.000000
10/16/2011	12:08:37 PM	H2 MFC set to  500.000000
10/16/2011	12:08:37 PM	BCl3 MFC set to  2.500000
10/16/2011	12:08:37 PM	PHl3 MFC set to  0.000000
10/16/2011	12:08:37 PM	SiCl4 MFC set to  50.000000
10/16/2011	12:08:37 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	12:08:37 PM	Tube furnace set to 1000
10/16/2011	12:23:37 PM	Helium valve closed
10/16/2011	12:23:37 PM	BCl3 valve closed
10/16/2011	12:23:37 PM	PH3 valve closed
10/16/2011	12:23:37 PM	SiCl4 pre valve closed
10/16/2011	12:23:37 PM	SiCl4 post valve closed
10/16/2011	12:23:37 PM	Main Vac valve closed
10/16/2011	12:23:37 PM	Bypass valve closed
10/16/2011	12:23:37 PM	H2 valve opened
10/16/2011	12:23:37 PM	Bubbler valve opened
10/16/2011	12:23:37 PM	Helium MFC set to  0.000000
10/16/2011	12:23:37 PM	H2 MFC set to  500.000000
10/16/2011	12:23:37 PM	BCl3 MFC set to  0.000000
10/16/2011	12:23:37 PM	PHl3 MFC set to  0.000000
10/16/2011	12:23:37 PM	SiCl4 MFC set to  0.000000
10/16/2011	12:23:37 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	12:23:37 PM	Tube furnace set to 750
10/16/2011	12:28:37 PM	H2 valve closed
10/16/2011	12:28:38 PM	BCl3 valve closed
10/16/2011	12:28:38 PM	PH3 valve closed
10/16/2011	12:28:38 PM	SiCl4 pre valve closed
10/16/2011	12:28:38 PM	SiCl4 post valve closed
10/16/2011	12:28:38 PM	Main Vac valve closed
10/16/2011	12:28:38 PM	Bypass valve closed
10/16/2011	12:28:38 PM	Helium valve opened
10/16/2011	12:28:38 PM	Bubbler valve opened
10/16/2011	12:28:38 PM	Helium MFC set to  500.000000
10/16/2011	12:28:38 PM	H2 MFC set to  0.000000
10/16/2011	12:28:38 PM	BCl3 MFC set to  0.000000
10/16/2011	12:28:38 PM	PHl3 MFC set to  0.000000
10/16/2011	12:28:38 PM	SiCl4 MFC set to  0.000000
10/16/2011	12:28:38 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	12:28:38 PM	Tube furnace set to 0
10/16/2011	12:48:38 PM	Helium valve closed
10/16/2011	12:48:38 PM	H2 valve closed
10/16/2011	12:48:38 PM	BCl3 valve closed
10/16/2011	12:48:38 PM	PH3 valve closed
10/16/2011	12:48:38 PM	SiCl4 pre valve closed
10/16/2011	12:48:38 PM	SiCl4 post valve closed
10/16/2011	12:48:38 PM	Main Vac valve closed
10/16/2011	12:48:38 PM	Bypass valve closed
10/16/2011	12:48:38 PM	Bubbler valve closed
10/16/2011	12:48:38 PM	Helium MFC set to  0.000000
10/16/2011	12:48:38 PM	H2 MFC set to  0.000000
10/16/2011	12:48:38 PM	BCl3 MFC set to  0.000000
10/16/2011	12:48:38 PM	PHl3 MFC set to  0.000000
10/16/2011	12:48:38 PM	SiCl4 MFC set to  0.000000
10/16/2011	12:48:38 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	12:48:38 PM	Tube furnace set to 0
10/16/2011	12:48:39 PM	Run finished at 12:48 PM
10/16/2011	1:52:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2011	1:52:24 PM	Recipe started at 1:52 PM
10/16/2011	1:52:24 PM	Helium valve closed
10/16/2011	1:52:24 PM	H2 valve closed
10/16/2011	1:52:25 PM	BCl3 valve closed
10/16/2011	1:52:25 PM	PH3 valve closed
10/16/2011	1:52:25 PM	SiCl4 pre valve closed
10/16/2011	1:52:25 PM	SiCl4 post valve closed
10/16/2011	1:52:25 PM	Main Vac valve closed
10/16/2011	1:52:25 PM	Bypass valve closed
10/16/2011	1:52:25 PM	Bubbler valve closed
10/16/2011	1:52:25 PM	Helium MFC set to  0.000000
10/16/2011	1:52:25 PM	H2 MFC set to  0.000000
10/16/2011	1:52:25 PM	BCl3 MFC set to  0.000000
10/16/2011	1:52:25 PM	PHl3 MFC set to  0.000000
10/16/2011	1:52:25 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:52:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:52:25 PM	Tube furnace set to 0
10/16/2011	1:52:28 PM	H2 valve closed
10/16/2011	1:52:28 PM	BCl3 valve closed
10/16/2011	1:52:28 PM	PH3 valve closed
10/16/2011	1:52:28 PM	SiCl4 pre valve closed
10/16/2011	1:52:28 PM	SiCl4 post valve closed
10/16/2011	1:52:28 PM	Main Vac valve closed
10/16/2011	1:52:28 PM	Bypass valve closed
10/16/2011	1:52:28 PM	Bubbler valve closed
10/16/2011	1:52:28 PM	Helium valve opened
10/16/2011	1:52:28 PM	Helium MFC set to  500.000000
10/16/2011	1:52:28 PM	H2 MFC set to  0.000000
10/16/2011	1:52:28 PM	BCl3 MFC set to  0.000000
10/16/2011	1:52:28 PM	PHl3 MFC set to  0.000000
10/16/2011	1:52:28 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:52:28 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:52:28 PM	Tube furnace set to 0
10/16/2011	1:52:35 PM	Helium valve closed
10/16/2011	1:52:35 PM	H2 valve closed
10/16/2011	1:52:35 PM	BCl3 valve closed
10/16/2011	1:52:35 PM	PH3 valve closed
10/16/2011	1:52:35 PM	SiCl4 pre valve closed
10/16/2011	1:52:35 PM	SiCl4 post valve closed
10/16/2011	1:52:35 PM	Main Vac valve closed
10/16/2011	1:52:35 PM	Bypass valve closed
10/16/2011	1:52:35 PM	Bubbler valve closed
10/16/2011	1:52:35 PM	Helium MFC set to  0.000000
10/16/2011	1:52:35 PM	H2 MFC set to  0.000000
10/16/2011	1:52:35 PM	BCl3 MFC set to  0.000000
10/16/2011	1:52:35 PM	PHl3 MFC set to  0.000000
10/16/2011	1:52:35 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:52:35 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:52:35 PM	Tube furnace set to 0
10/16/2011	1:52:36 PM	Run finished at 1:52 PM
10/16/2011	1:52:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2011	1:56:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2011	1:56:56 PM	Recipe started at 1:56 PM
10/16/2011	1:56:56 PM	Helium valve closed
10/16/2011	1:56:56 PM	H2 valve closed
10/16/2011	1:56:56 PM	BCl3 valve closed
10/16/2011	1:56:56 PM	PH3 valve closed
10/16/2011	1:56:56 PM	SiCl4 pre valve closed
10/16/2011	1:56:56 PM	SiCl4 post valve closed
10/16/2011	1:56:56 PM	Main Vac valve closed
10/16/2011	1:56:56 PM	Bubbler valve closed
10/16/2011	1:56:56 PM	Bypass valve opened
10/16/2011	1:56:56 PM	Helium MFC set to  0.000000
10/16/2011	1:56:56 PM	H2 MFC set to  0.000000
10/16/2011	1:56:56 PM	BCl3 MFC set to  0.000000
10/16/2011	1:56:56 PM	PHl3 MFC set to  0.000000
10/16/2011	1:56:56 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:56:56 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:56:56 PM	Tube furnace set to 0
10/16/2011	1:58:05 PM	Helium valve closed
10/16/2011	1:58:05 PM	H2 valve closed
10/16/2011	1:58:05 PM	BCl3 valve closed
10/16/2011	1:58:05 PM	PH3 valve closed
10/16/2011	1:58:05 PM	SiCl4 pre valve closed
10/16/2011	1:58:05 PM	SiCl4 post valve closed
10/16/2011	1:58:05 PM	Main Vac valve closed
10/16/2011	1:58:05 PM	Bubbler valve closed
10/16/2011	1:58:05 PM	Bypass valve opened
10/16/2011	1:58:05 PM	Helium MFC set to  0.000000
10/16/2011	1:58:05 PM	H2 MFC set to  0.000000
10/16/2011	1:58:05 PM	BCl3 MFC set to  0.000000
10/16/2011	1:58:05 PM	PHl3 MFC set to  0.000000
10/16/2011	1:58:05 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:58:05 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:58:06 PM	Tube furnace set to 0
10/16/2011	1:59:06 PM	Helium valve closed
10/16/2011	1:59:06 PM	H2 valve closed
10/16/2011	1:59:06 PM	BCl3 valve closed
10/16/2011	1:59:06 PM	PH3 valve closed
10/16/2011	1:59:06 PM	SiCl4 pre valve closed
10/16/2011	1:59:06 PM	SiCl4 post valve closed
10/16/2011	1:59:06 PM	Bypass valve closed
10/16/2011	1:59:06 PM	Bubbler valve closed
10/16/2011	1:59:06 PM	Main Vac valve opened
10/16/2011	1:59:06 PM	Helium MFC set to  0.000000
10/16/2011	1:59:06 PM	H2 MFC set to  0.000000
10/16/2011	1:59:06 PM	BCl3 MFC set to  0.000000
10/16/2011	1:59:06 PM	PHl3 MFC set to  0.000000
10/16/2011	1:59:06 PM	SiCl4 MFC set to  0.000000
10/16/2011	1:59:06 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	1:59:06 PM	Tube furnace set to 0
10/16/2011	1:59:07 PM	Run finished at 1:59 PM
10/16/2011	1:59:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2011	2:09:37 PM	Recipe started at 2:09 PM
10/16/2011	2:09:37 PM	Helium valve closed
10/16/2011	2:09:37 PM	H2 valve closed
10/16/2011	2:09:37 PM	BCl3 valve closed
10/16/2011	2:09:37 PM	PH3 valve closed
10/16/2011	2:09:37 PM	SiCl4 pre valve closed
10/16/2011	2:09:37 PM	SiCl4 post valve closed
10/16/2011	2:09:37 PM	Bypass valve closed
10/16/2011	2:09:37 PM	Bubbler valve closed
10/16/2011	2:09:37 PM	Main Vac valve opened
10/16/2011	2:09:37 PM	Helium MFC set to  0.000000
10/16/2011	2:09:37 PM	H2 MFC set to  0.000000
10/16/2011	2:09:37 PM	BCl3 MFC set to  0.000000
10/16/2011	2:09:37 PM	PHl3 MFC set to  0.000000
10/16/2011	2:09:37 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:09:37 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:09:37 PM	Tube furnace set to 150
10/16/2011	2:09:38 PM	H2 valve closed
10/16/2011	2:09:38 PM	BCl3 valve closed
10/16/2011	2:09:38 PM	PH3 valve closed
10/16/2011	2:09:39 PM	SiCl4 pre valve closed
10/16/2011	2:09:39 PM	SiCl4 post valve closed
10/16/2011	2:09:39 PM	Bypass valve closed
10/16/2011	2:09:39 PM	Bubbler valve closed
10/16/2011	2:09:39 PM	Helium valve opened
10/16/2011	2:09:39 PM	Main Vac valve opened
10/16/2011	2:09:39 PM	Helium MFC set to  20.000000
10/16/2011	2:09:39 PM	H2 MFC set to  0.000000
10/16/2011	2:09:39 PM	BCl3 MFC set to  0.000000
10/16/2011	2:09:39 PM	PHl3 MFC set to  0.000000
10/16/2011	2:09:39 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:09:39 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:09:39 PM	Tube furnace set to 150
10/16/2011	2:10:09 PM	Helium valve closed
10/16/2011	2:10:09 PM	H2 valve closed
10/16/2011	2:10:09 PM	BCl3 valve closed
10/16/2011	2:10:09 PM	PH3 valve closed
10/16/2011	2:10:09 PM	SiCl4 pre valve closed
10/16/2011	2:10:09 PM	SiCl4 post valve closed
10/16/2011	2:10:09 PM	Bypass valve closed
10/16/2011	2:10:09 PM	Bubbler valve closed
10/16/2011	2:10:09 PM	Main Vac valve opened
10/16/2011	2:10:09 PM	Helium MFC set to  0.000000
10/16/2011	2:10:09 PM	H2 MFC set to  0.000000
10/16/2011	2:10:09 PM	BCl3 MFC set to  0.000000
10/16/2011	2:10:09 PM	PHl3 MFC set to  0.000000
10/16/2011	2:10:09 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:10:09 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:10:09 PM	Tube furnace set to 150
10/16/2011	2:10:39 PM	H2 valve closed
10/16/2011	2:10:39 PM	BCl3 valve closed
10/16/2011	2:10:39 PM	PH3 valve closed
10/16/2011	2:10:39 PM	SiCl4 pre valve closed
10/16/2011	2:10:39 PM	SiCl4 post valve closed
10/16/2011	2:10:39 PM	Bypass valve closed
10/16/2011	2:10:39 PM	Bubbler valve closed
10/16/2011	2:10:39 PM	Helium valve opened
10/16/2011	2:10:39 PM	Main Vac valve opened
10/16/2011	2:10:39 PM	Helium MFC set to  20.000000
10/16/2011	2:10:39 PM	H2 MFC set to  0.000000
10/16/2011	2:10:39 PM	BCl3 MFC set to  0.000000
10/16/2011	2:10:39 PM	PHl3 MFC set to  0.000000
10/16/2011	2:10:39 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:10:39 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:10:39 PM	Tube furnace set to 150
10/16/2011	2:11:09 PM	Helium valve closed
10/16/2011	2:11:09 PM	H2 valve closed
10/16/2011	2:11:09 PM	BCl3 valve closed
10/16/2011	2:11:09 PM	PH3 valve closed
10/16/2011	2:11:09 PM	SiCl4 pre valve closed
10/16/2011	2:11:09 PM	SiCl4 post valve closed
10/16/2011	2:11:09 PM	Bypass valve closed
10/16/2011	2:11:09 PM	Bubbler valve closed
10/16/2011	2:11:09 PM	Main Vac valve opened
10/16/2011	2:11:09 PM	Helium MFC set to  0.000000
10/16/2011	2:11:09 PM	H2 MFC set to  0.000000
10/16/2011	2:11:09 PM	BCl3 MFC set to  0.000000
10/16/2011	2:11:09 PM	PHl3 MFC set to  0.000000
10/16/2011	2:11:09 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:11:09 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:11:09 PM	Tube furnace set to 150
10/16/2011	2:11:39 PM	H2 valve closed
10/16/2011	2:11:39 PM	BCl3 valve closed
10/16/2011	2:11:39 PM	PH3 valve closed
10/16/2011	2:11:39 PM	SiCl4 pre valve closed
10/16/2011	2:11:39 PM	SiCl4 post valve closed
10/16/2011	2:11:39 PM	Bypass valve closed
10/16/2011	2:11:39 PM	Bubbler valve closed
10/16/2011	2:11:39 PM	Helium valve opened
10/16/2011	2:11:39 PM	Main Vac valve opened
10/16/2011	2:11:39 PM	Helium MFC set to  20.000000
10/16/2011	2:11:39 PM	H2 MFC set to  0.000000
10/16/2011	2:11:39 PM	BCl3 MFC set to  0.000000
10/16/2011	2:11:39 PM	PHl3 MFC set to  0.000000
10/16/2011	2:11:39 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:11:39 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:11:39 PM	Tube furnace set to 150
10/16/2011	2:12:09 PM	Helium valve closed
10/16/2011	2:12:09 PM	H2 valve closed
10/16/2011	2:12:09 PM	BCl3 valve closed
10/16/2011	2:12:09 PM	PH3 valve closed
10/16/2011	2:12:09 PM	SiCl4 pre valve closed
10/16/2011	2:12:09 PM	SiCl4 post valve closed
10/16/2011	2:12:09 PM	Bypass valve closed
10/16/2011	2:12:09 PM	Bubbler valve closed
10/16/2011	2:12:09 PM	Main Vac valve opened
10/16/2011	2:12:10 PM	Helium MFC set to  0.000000
10/16/2011	2:12:10 PM	H2 MFC set to  0.000000
10/16/2011	2:12:10 PM	BCl3 MFC set to  0.000000
10/16/2011	2:12:10 PM	PHl3 MFC set to  0.000000
10/16/2011	2:12:10 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:12:10 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:12:10 PM	Tube furnace set to 150
10/16/2011	2:12:40 PM	H2 valve closed
10/16/2011	2:12:40 PM	BCl3 valve closed
10/16/2011	2:12:40 PM	PH3 valve closed
10/16/2011	2:12:40 PM	SiCl4 pre valve closed
10/16/2011	2:12:40 PM	SiCl4 post valve closed
10/16/2011	2:12:40 PM	Bypass valve closed
10/16/2011	2:12:40 PM	Bubbler valve closed
10/16/2011	2:12:40 PM	Helium valve opened
10/16/2011	2:12:40 PM	Main Vac valve opened
10/16/2011	2:12:40 PM	Helium MFC set to  20.000000
10/16/2011	2:12:40 PM	H2 MFC set to  0.000000
10/16/2011	2:12:40 PM	BCl3 MFC set to  0.000000
10/16/2011	2:12:40 PM	PHl3 MFC set to  0.000000
10/16/2011	2:12:40 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:12:40 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:12:40 PM	Tube furnace set to 150
10/16/2011	2:13:10 PM	Helium valve closed
10/16/2011	2:13:10 PM	H2 valve closed
10/16/2011	2:13:10 PM	BCl3 valve closed
10/16/2011	2:13:10 PM	PH3 valve closed
10/16/2011	2:13:10 PM	SiCl4 pre valve closed
10/16/2011	2:13:10 PM	SiCl4 post valve closed
10/16/2011	2:13:10 PM	Bypass valve closed
10/16/2011	2:13:10 PM	Bubbler valve closed
10/16/2011	2:13:10 PM	Main Vac valve opened
10/16/2011	2:13:10 PM	Helium MFC set to  0.000000
10/16/2011	2:13:10 PM	H2 MFC set to  0.000000
10/16/2011	2:13:10 PM	BCl3 MFC set to  0.000000
10/16/2011	2:13:10 PM	PHl3 MFC set to  0.000000
10/16/2011	2:13:10 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:13:10 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:13:10 PM	Tube furnace set to 150
10/16/2011	2:13:40 PM	H2 valve closed
10/16/2011	2:13:40 PM	BCl3 valve closed
10/16/2011	2:13:40 PM	PH3 valve closed
10/16/2011	2:13:40 PM	SiCl4 pre valve closed
10/16/2011	2:13:40 PM	SiCl4 post valve closed
10/16/2011	2:13:40 PM	Bypass valve closed
10/16/2011	2:13:40 PM	Bubbler valve closed
10/16/2011	2:13:40 PM	Helium valve opened
10/16/2011	2:13:40 PM	Main Vac valve opened
10/16/2011	2:13:40 PM	Helium MFC set to  20.000000
10/16/2011	2:13:40 PM	H2 MFC set to  0.000000
10/16/2011	2:13:40 PM	BCl3 MFC set to  0.000000
10/16/2011	2:13:40 PM	PHl3 MFC set to  0.000000
10/16/2011	2:13:40 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:13:40 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:13:40 PM	Tube furnace set to 150
10/16/2011	2:14:10 PM	Helium valve closed
10/16/2011	2:14:10 PM	H2 valve closed
10/16/2011	2:14:10 PM	BCl3 valve closed
10/16/2011	2:14:10 PM	PH3 valve closed
10/16/2011	2:14:10 PM	SiCl4 pre valve closed
10/16/2011	2:14:10 PM	SiCl4 post valve closed
10/16/2011	2:14:10 PM	Bypass valve closed
10/16/2011	2:14:10 PM	Bubbler valve closed
10/16/2011	2:14:10 PM	Main Vac valve opened
10/16/2011	2:14:10 PM	Helium MFC set to  0.000000
10/16/2011	2:14:10 PM	H2 MFC set to  0.000000
10/16/2011	2:14:10 PM	BCl3 MFC set to  0.000000
10/16/2011	2:14:10 PM	PHl3 MFC set to  0.000000
10/16/2011	2:14:10 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:14:10 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:14:10 PM	Tube furnace set to 150
10/16/2011	2:14:40 PM	H2 valve closed
10/16/2011	2:14:40 PM	BCl3 valve closed
10/16/2011	2:14:40 PM	PH3 valve closed
10/16/2011	2:14:40 PM	SiCl4 pre valve closed
10/16/2011	2:14:40 PM	SiCl4 post valve closed
10/16/2011	2:14:40 PM	Bypass valve closed
10/16/2011	2:14:40 PM	Bubbler valve closed
10/16/2011	2:14:40 PM	Helium valve opened
10/16/2011	2:14:40 PM	Main Vac valve opened
10/16/2011	2:14:40 PM	Helium MFC set to  20.000000
10/16/2011	2:14:40 PM	H2 MFC set to  0.000000
10/16/2011	2:14:40 PM	BCl3 MFC set to  0.000000
10/16/2011	2:14:40 PM	PHl3 MFC set to  0.000000
10/16/2011	2:14:40 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:14:40 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:14:41 PM	Tube furnace set to 150
10/16/2011	2:15:11 PM	Helium valve closed
10/16/2011	2:15:11 PM	H2 valve closed
10/16/2011	2:15:11 PM	BCl3 valve closed
10/16/2011	2:15:11 PM	PH3 valve closed
10/16/2011	2:15:11 PM	SiCl4 pre valve closed
10/16/2011	2:15:11 PM	SiCl4 post valve closed
10/16/2011	2:15:11 PM	Bypass valve closed
10/16/2011	2:15:11 PM	Bubbler valve closed
10/16/2011	2:15:11 PM	Main Vac valve opened
10/16/2011	2:15:11 PM	Helium MFC set to  0.000000
10/16/2011	2:15:11 PM	H2 MFC set to  0.000000
10/16/2011	2:15:11 PM	BCl3 MFC set to  0.000000
10/16/2011	2:15:11 PM	PHl3 MFC set to  0.000000
10/16/2011	2:15:11 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:15:11 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:15:11 PM	Tube furnace set to 150
10/16/2011	2:15:41 PM	H2 valve closed
10/16/2011	2:15:41 PM	BCl3 valve closed
10/16/2011	2:15:41 PM	PH3 valve closed
10/16/2011	2:15:41 PM	SiCl4 pre valve closed
10/16/2011	2:15:41 PM	SiCl4 post valve closed
10/16/2011	2:15:41 PM	Bypass valve closed
10/16/2011	2:15:41 PM	Bubbler valve closed
10/16/2011	2:15:41 PM	Helium valve opened
10/16/2011	2:15:41 PM	Main Vac valve opened
10/16/2011	2:15:41 PM	Helium MFC set to  20.000000
10/16/2011	2:15:41 PM	H2 MFC set to  0.000000
10/16/2011	2:15:41 PM	BCl3 MFC set to  0.000000
10/16/2011	2:15:41 PM	PHl3 MFC set to  0.000000
10/16/2011	2:15:41 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:15:41 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:15:41 PM	Tube furnace set to 150
10/16/2011	2:16:11 PM	Helium valve closed
10/16/2011	2:16:11 PM	H2 valve closed
10/16/2011	2:16:11 PM	BCl3 valve closed
10/16/2011	2:16:11 PM	PH3 valve closed
10/16/2011	2:16:11 PM	SiCl4 pre valve closed
10/16/2011	2:16:11 PM	SiCl4 post valve closed
10/16/2011	2:16:11 PM	Bypass valve closed
10/16/2011	2:16:11 PM	Bubbler valve closed
10/16/2011	2:16:11 PM	Main Vac valve opened
10/16/2011	2:16:11 PM	Helium MFC set to  0.000000
10/16/2011	2:16:11 PM	H2 MFC set to  0.000000
10/16/2011	2:16:11 PM	BCl3 MFC set to  0.000000
10/16/2011	2:16:11 PM	PHl3 MFC set to  0.000000
10/16/2011	2:16:11 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:16:11 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:16:11 PM	Tube furnace set to 150
10/16/2011	2:16:41 PM	H2 valve closed
10/16/2011	2:16:41 PM	BCl3 valve closed
10/16/2011	2:16:41 PM	PH3 valve closed
10/16/2011	2:16:41 PM	SiCl4 pre valve closed
10/16/2011	2:16:41 PM	SiCl4 post valve closed
10/16/2011	2:16:41 PM	Bypass valve closed
10/16/2011	2:16:41 PM	Bubbler valve closed
10/16/2011	2:16:41 PM	Helium valve opened
10/16/2011	2:16:41 PM	Main Vac valve opened
10/16/2011	2:16:41 PM	Helium MFC set to  20.000000
10/16/2011	2:16:41 PM	H2 MFC set to  0.000000
10/16/2011	2:16:41 PM	BCl3 MFC set to  0.000000
10/16/2011	2:16:41 PM	PHl3 MFC set to  0.000000
10/16/2011	2:16:41 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:16:41 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:16:41 PM	Tube furnace set to 150
10/16/2011	2:17:12 PM	Helium valve closed
10/16/2011	2:17:12 PM	H2 valve closed
10/16/2011	2:17:12 PM	BCl3 valve closed
10/16/2011	2:17:12 PM	PH3 valve closed
10/16/2011	2:17:12 PM	SiCl4 pre valve closed
10/16/2011	2:17:12 PM	SiCl4 post valve closed
10/16/2011	2:17:12 PM	Bypass valve closed
10/16/2011	2:17:12 PM	Bubbler valve closed
10/16/2011	2:17:12 PM	Main Vac valve opened
10/16/2011	2:17:12 PM	Helium MFC set to  0.000000
10/16/2011	2:17:12 PM	H2 MFC set to  0.000000
10/16/2011	2:17:12 PM	BCl3 MFC set to  0.000000
10/16/2011	2:17:12 PM	PHl3 MFC set to  0.000000
10/16/2011	2:17:12 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:17:12 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:17:12 PM	Tube furnace set to 150
10/16/2011	2:17:42 PM	H2 valve closed
10/16/2011	2:17:42 PM	BCl3 valve closed
10/16/2011	2:17:42 PM	PH3 valve closed
10/16/2011	2:17:42 PM	SiCl4 pre valve closed
10/16/2011	2:17:42 PM	SiCl4 post valve closed
10/16/2011	2:17:42 PM	Bypass valve closed
10/16/2011	2:17:42 PM	Bubbler valve closed
10/16/2011	2:17:42 PM	Helium valve opened
10/16/2011	2:17:42 PM	Main Vac valve opened
10/16/2011	2:17:42 PM	Helium MFC set to  20.000000
10/16/2011	2:17:42 PM	H2 MFC set to  0.000000
10/16/2011	2:17:42 PM	BCl3 MFC set to  0.000000
10/16/2011	2:17:42 PM	PHl3 MFC set to  0.000000
10/16/2011	2:17:42 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:17:42 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:17:42 PM	Tube furnace set to 150
10/16/2011	2:18:12 PM	Helium valve closed
10/16/2011	2:18:12 PM	H2 valve closed
10/16/2011	2:18:12 PM	BCl3 valve closed
10/16/2011	2:18:12 PM	PH3 valve closed
10/16/2011	2:18:12 PM	SiCl4 pre valve closed
10/16/2011	2:18:12 PM	SiCl4 post valve closed
10/16/2011	2:18:12 PM	Bypass valve closed
10/16/2011	2:18:12 PM	Bubbler valve closed
10/16/2011	2:18:12 PM	Main Vac valve opened
10/16/2011	2:18:12 PM	Helium MFC set to  0.000000
10/16/2011	2:18:12 PM	H2 MFC set to  0.000000
10/16/2011	2:18:12 PM	BCl3 MFC set to  0.000000
10/16/2011	2:18:12 PM	PHl3 MFC set to  0.000000
10/16/2011	2:18:12 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:18:12 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:18:12 PM	Tube furnace set to 150
10/16/2011	2:18:42 PM	H2 valve closed
10/16/2011	2:18:42 PM	BCl3 valve closed
10/16/2011	2:18:42 PM	PH3 valve closed
10/16/2011	2:18:42 PM	SiCl4 pre valve closed
10/16/2011	2:18:42 PM	SiCl4 post valve closed
10/16/2011	2:18:42 PM	Bypass valve closed
10/16/2011	2:18:42 PM	Bubbler valve closed
10/16/2011	2:18:42 PM	Helium valve opened
10/16/2011	2:18:42 PM	Main Vac valve opened
10/16/2011	2:18:42 PM	Helium MFC set to  20.000000
10/16/2011	2:18:42 PM	H2 MFC set to  0.000000
10/16/2011	2:18:42 PM	BCl3 MFC set to  0.000000
10/16/2011	2:18:42 PM	PHl3 MFC set to  0.000000
10/16/2011	2:18:42 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:18:42 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:18:42 PM	Tube furnace set to 150
10/16/2011	2:19:12 PM	Helium valve closed
10/16/2011	2:19:12 PM	H2 valve closed
10/16/2011	2:19:12 PM	BCl3 valve closed
10/16/2011	2:19:12 PM	PH3 valve closed
10/16/2011	2:19:12 PM	SiCl4 pre valve closed
10/16/2011	2:19:12 PM	SiCl4 post valve closed
10/16/2011	2:19:12 PM	Bypass valve closed
10/16/2011	2:19:12 PM	Bubbler valve closed
10/16/2011	2:19:12 PM	Main Vac valve opened
10/16/2011	2:19:12 PM	Helium MFC set to  0.000000
10/16/2011	2:19:12 PM	H2 MFC set to  0.000000
10/16/2011	2:19:12 PM	BCl3 MFC set to  0.000000
10/16/2011	2:19:12 PM	PHl3 MFC set to  0.000000
10/16/2011	2:19:12 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:19:12 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:19:13 PM	Tube furnace set to 150
10/16/2011	2:19:14 PM	Run finished at 2:19 PM
10/16/2011	2:23:06 PM	Main Vac valve closed
10/16/2011	2:23:28 PM	Main Vac valve opened
10/16/2011	2:24:53 PM	Main Vac valve closed
10/16/2011	2:25:16 PM	Main Vac valve opened
10/16/2011	2:26:36 PM	Recipe started at 2:26 PM
10/16/2011	2:26:36 PM	Helium valve closed
10/16/2011	2:26:36 PM	H2 valve closed
10/16/2011	2:26:36 PM	BCl3 valve closed
10/16/2011	2:26:36 PM	PH3 valve closed
10/16/2011	2:26:36 PM	SiCl4 pre valve closed
10/16/2011	2:26:36 PM	SiCl4 post valve closed
10/16/2011	2:26:36 PM	Main Vac valve closed
10/16/2011	2:26:36 PM	Bypass valve closed
10/16/2011	2:26:36 PM	Bubbler valve closed
10/16/2011	2:26:36 PM	Helium MFC set to  0.000000
10/16/2011	2:26:36 PM	H2 MFC set to  0.000000
10/16/2011	2:26:36 PM	BCl3 MFC set to  0.000000
10/16/2011	2:26:36 PM	PHl3 MFC set to  0.000000
10/16/2011	2:26:36 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:26:36 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:26:36 PM	Tube furnace set to 0
10/16/2011	2:26:39 PM	Helium valve closed
10/16/2011	2:26:39 PM	BCl3 valve closed
10/16/2011	2:26:39 PM	PH3 valve closed
10/16/2011	2:26:39 PM	SiCl4 pre valve closed
10/16/2011	2:26:39 PM	SiCl4 post valve closed
10/16/2011	2:26:39 PM	Main Vac valve closed
10/16/2011	2:26:39 PM	Bypass valve closed
10/16/2011	2:26:39 PM	Bubbler valve closed
10/16/2011	2:26:39 PM	H2 valve opened
10/16/2011	2:26:39 PM	Helium MFC set to  0.000000
10/16/2011	2:26:39 PM	H2 MFC set to  500.000000
10/16/2011	2:26:39 PM	BCl3 MFC set to  0.000000
10/16/2011	2:26:39 PM	PHl3 MFC set to  0.000000
10/16/2011	2:26:39 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:26:39 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:26:39 PM	Tube furnace set to 0
10/16/2011	2:27:44 PM	Helium valve closed
10/16/2011	2:27:44 PM	BCl3 valve closed
10/16/2011	2:27:44 PM	PH3 valve closed
10/16/2011	2:27:44 PM	SiCl4 pre valve closed
10/16/2011	2:27:44 PM	SiCl4 post valve closed
10/16/2011	2:27:44 PM	Main Vac valve closed
10/16/2011	2:27:44 PM	Bypass valve closed
10/16/2011	2:27:44 PM	H2 valve opened
10/16/2011	2:27:44 PM	Bubbler valve opened
10/16/2011	2:27:44 PM	Helium MFC set to  0.000000
10/16/2011	2:27:44 PM	H2 MFC set to  500.000000
10/16/2011	2:27:44 PM	BCl3 MFC set to  0.000000
10/16/2011	2:27:44 PM	PHl3 MFC set to  0.000000
10/16/2011	2:27:44 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:27:44 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:27:45 PM	Tube furnace set to 0
10/16/2011	2:27:46 PM	Helium valve closed
10/16/2011	2:27:46 PM	BCl3 valve closed
10/16/2011	2:27:46 PM	PH3 valve closed
10/16/2011	2:27:46 PM	SiCl4 pre valve closed
10/16/2011	2:27:46 PM	SiCl4 post valve closed
10/16/2011	2:27:46 PM	Main Vac valve closed
10/16/2011	2:27:46 PM	Bypass valve closed
10/16/2011	2:27:46 PM	H2 valve opened
10/16/2011	2:27:46 PM	Bubbler valve opened
10/16/2011	2:27:46 PM	Helium MFC set to  0.000000
10/16/2011	2:27:46 PM	H2 MFC set to  500.000000
10/16/2011	2:27:46 PM	BCl3 MFC set to  0.000000
10/16/2011	2:27:46 PM	PHl3 MFC set to  0.000000
10/16/2011	2:27:46 PM	SiCl4 MFC set to  0.000000
10/16/2011	2:27:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:27:46 PM	Tube furnace set to 1000
10/16/2011	2:47:46 PM	Helium valve closed
10/16/2011	2:47:46 PM	PH3 valve closed
10/16/2011	2:47:46 PM	Main Vac valve closed
10/16/2011	2:47:46 PM	Bypass valve closed
10/16/2011	2:47:46 PM	H2 valve opened
10/16/2011	2:47:46 PM	BCl3 valve opened
10/16/2011	2:47:46 PM	SiCl4 pre valve opened
10/16/2011	2:47:46 PM	SiCl4 post valve opened
10/16/2011	2:47:46 PM	Bubbler valve opened
10/16/2011	2:47:46 PM	Helium MFC set to  0.000000
10/16/2011	2:47:46 PM	H2 MFC set to  500.000000
10/16/2011	2:47:46 PM	BCl3 MFC set to  2.500000
10/16/2011	2:47:46 PM	PHl3 MFC set to  0.000000
10/16/2011	2:47:46 PM	SiCl4 MFC set to  50.000000
10/16/2011	2:47:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	2:47:46 PM	Tube furnace set to 1000
10/16/2011	3:02:46 PM	Helium valve closed
10/16/2011	3:02:46 PM	BCl3 valve closed
10/16/2011	3:02:46 PM	PH3 valve closed
10/16/2011	3:02:46 PM	SiCl4 pre valve closed
10/16/2011	3:02:46 PM	SiCl4 post valve closed
10/16/2011	3:02:46 PM	Main Vac valve closed
10/16/2011	3:02:46 PM	Bypass valve closed
10/16/2011	3:02:46 PM	H2 valve opened
10/16/2011	3:02:46 PM	Bubbler valve opened
10/16/2011	3:02:46 PM	Helium MFC set to  0.000000
10/16/2011	3:02:46 PM	H2 MFC set to  500.000000
10/16/2011	3:02:46 PM	BCl3 MFC set to  0.000000
10/16/2011	3:02:46 PM	PHl3 MFC set to  0.000000
10/16/2011	3:02:46 PM	SiCl4 MFC set to  0.000000
10/16/2011	3:02:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	3:02:46 PM	Tube furnace set to 750
10/16/2011	3:07:46 PM	H2 valve closed
10/16/2011	3:07:46 PM	BCl3 valve closed
10/16/2011	3:07:46 PM	PH3 valve closed
10/16/2011	3:07:46 PM	SiCl4 pre valve closed
10/16/2011	3:07:46 PM	SiCl4 post valve closed
10/16/2011	3:07:46 PM	Main Vac valve closed
10/16/2011	3:07:46 PM	Bypass valve closed
10/16/2011	3:07:46 PM	Helium valve opened
10/16/2011	3:07:46 PM	Bubbler valve opened
10/16/2011	3:07:46 PM	Helium MFC set to  500.000000
10/16/2011	3:07:46 PM	H2 MFC set to  0.000000
10/16/2011	3:07:46 PM	BCl3 MFC set to  0.000000
10/16/2011	3:07:46 PM	PHl3 MFC set to  0.000000
10/16/2011	3:07:46 PM	SiCl4 MFC set to  0.000000
10/16/2011	3:07:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	3:07:46 PM	Tube furnace set to 0
10/16/2011	3:27:46 PM	Helium valve closed
10/16/2011	3:27:46 PM	H2 valve closed
10/16/2011	3:27:46 PM	BCl3 valve closed
10/16/2011	3:27:46 PM	PH3 valve closed
10/16/2011	3:27:46 PM	SiCl4 pre valve closed
10/16/2011	3:27:46 PM	SiCl4 post valve closed
10/16/2011	3:27:46 PM	Main Vac valve closed
10/16/2011	3:27:46 PM	Bypass valve closed
10/16/2011	3:27:46 PM	Bubbler valve closed
10/16/2011	3:27:46 PM	Helium MFC set to  0.000000
10/16/2011	3:27:46 PM	H2 MFC set to  0.000000
10/16/2011	3:27:46 PM	BCl3 MFC set to  0.000000
10/16/2011	3:27:46 PM	PHl3 MFC set to  0.000000
10/16/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
10/16/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	3:27:46 PM	Tube furnace set to 0
10/16/2011	3:27:47 PM	Run finished at 3:27 PM
10/16/2011	5:45:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2011	5:45:16 PM	Recipe started at 5:45 PM
10/16/2011	5:45:16 PM	Helium valve closed
10/16/2011	5:45:16 PM	H2 valve closed
10/16/2011	5:45:16 PM	BCl3 valve closed
10/16/2011	5:45:16 PM	PH3 valve closed
10/16/2011	5:45:16 PM	SiCl4 pre valve closed
10/16/2011	5:45:16 PM	SiCl4 post valve closed
10/16/2011	5:45:16 PM	Main Vac valve closed
10/16/2011	5:45:16 PM	Bypass valve closed
10/16/2011	5:45:16 PM	Bubbler valve closed
10/16/2011	5:45:16 PM	Helium MFC set to  0.000000
10/16/2011	5:45:16 PM	H2 MFC set to  0.000000
10/16/2011	5:45:16 PM	BCl3 MFC set to  0.000000
10/16/2011	5:45:16 PM	PHl3 MFC set to  0.000000
10/16/2011	5:45:16 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:45:16 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:45:16 PM	Tube furnace set to 0
10/16/2011	5:45:19 PM	H2 valve closed
10/16/2011	5:45:19 PM	BCl3 valve closed
10/16/2011	5:45:19 PM	PH3 valve closed
10/16/2011	5:45:19 PM	SiCl4 pre valve closed
10/16/2011	5:45:19 PM	SiCl4 post valve closed
10/16/2011	5:45:19 PM	Main Vac valve closed
10/16/2011	5:45:19 PM	Bypass valve closed
10/16/2011	5:45:19 PM	Bubbler valve closed
10/16/2011	5:45:19 PM	Helium valve opened
10/16/2011	5:45:19 PM	Helium MFC set to  500.000000
10/16/2011	5:45:19 PM	H2 MFC set to  0.000000
10/16/2011	5:45:19 PM	BCl3 MFC set to  0.000000
10/16/2011	5:45:19 PM	PHl3 MFC set to  0.000000
10/16/2011	5:45:19 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:45:19 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:45:20 PM	Tube furnace set to 0
10/16/2011	5:45:25 PM	Helium valve closed
10/16/2011	5:45:25 PM	H2 valve closed
10/16/2011	5:45:25 PM	BCl3 valve closed
10/16/2011	5:45:25 PM	PH3 valve closed
10/16/2011	5:45:25 PM	SiCl4 pre valve closed
10/16/2011	5:45:25 PM	SiCl4 post valve closed
10/16/2011	5:45:25 PM	Main Vac valve closed
10/16/2011	5:45:25 PM	Bypass valve closed
10/16/2011	5:45:25 PM	Bubbler valve closed
10/16/2011	5:45:25 PM	Helium MFC set to  0.000000
10/16/2011	5:45:25 PM	H2 MFC set to  0.000000
10/16/2011	5:45:25 PM	BCl3 MFC set to  0.000000
10/16/2011	5:45:25 PM	PHl3 MFC set to  0.000000
10/16/2011	5:45:25 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:45:25 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:45:25 PM	Tube furnace set to 0
10/16/2011	5:45:26 PM	Run finished at 5:45 PM
10/16/2011	5:45:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/16/2011	5:53:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/16/2011	5:53:21 PM	Recipe started at 5:53 PM
10/16/2011	5:53:21 PM	Helium valve closed
10/16/2011	5:53:21 PM	H2 valve closed
10/16/2011	5:53:21 PM	BCl3 valve closed
10/16/2011	5:53:21 PM	PH3 valve closed
10/16/2011	5:53:21 PM	SiCl4 pre valve closed
10/16/2011	5:53:21 PM	SiCl4 post valve closed
10/16/2011	5:53:21 PM	Main Vac valve closed
10/16/2011	5:53:21 PM	Bubbler valve closed
10/16/2011	5:53:21 PM	Bypass valve opened
10/16/2011	5:53:21 PM	Helium MFC set to  0.000000
10/16/2011	5:53:21 PM	H2 MFC set to  0.000000
10/16/2011	5:53:21 PM	BCl3 MFC set to  0.000000
10/16/2011	5:53:21 PM	PHl3 MFC set to  0.000000
10/16/2011	5:53:21 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:53:21 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:53:22 PM	Tube furnace set to 0
10/16/2011	5:54:33 PM	Helium valve closed
10/16/2011	5:54:33 PM	H2 valve closed
10/16/2011	5:54:33 PM	BCl3 valve closed
10/16/2011	5:54:33 PM	PH3 valve closed
10/16/2011	5:54:33 PM	SiCl4 pre valve closed
10/16/2011	5:54:33 PM	SiCl4 post valve closed
10/16/2011	5:54:33 PM	Main Vac valve closed
10/16/2011	5:54:33 PM	Bubbler valve closed
10/16/2011	5:54:33 PM	Bypass valve opened
10/16/2011	5:54:33 PM	Helium MFC set to  0.000000
10/16/2011	5:54:33 PM	H2 MFC set to  0.000000
10/16/2011	5:54:33 PM	BCl3 MFC set to  0.000000
10/16/2011	5:54:33 PM	PHl3 MFC set to  0.000000
10/16/2011	5:54:33 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:54:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:54:33 PM	Tube furnace set to 0
10/16/2011	5:55:33 PM	Helium valve closed
10/16/2011	5:55:33 PM	H2 valve closed
10/16/2011	5:55:33 PM	BCl3 valve closed
10/16/2011	5:55:33 PM	PH3 valve closed
10/16/2011	5:55:33 PM	SiCl4 pre valve closed
10/16/2011	5:55:33 PM	SiCl4 post valve closed
10/16/2011	5:55:33 PM	Bypass valve closed
10/16/2011	5:55:33 PM	Bubbler valve closed
10/16/2011	5:55:33 PM	Main Vac valve opened
10/16/2011	5:55:33 PM	Helium MFC set to  0.000000
10/16/2011	5:55:33 PM	H2 MFC set to  0.000000
10/16/2011	5:55:33 PM	BCl3 MFC set to  0.000000
10/16/2011	5:55:33 PM	PHl3 MFC set to  0.000000
10/16/2011	5:55:33 PM	SiCl4 MFC set to  0.000000
10/16/2011	5:55:33 PM	Bypass solenoid MFC set to  0.000000
10/16/2011	5:55:34 PM	Tube furnace set to 0
10/16/2011	5:55:35 PM	Run finished at 5:55 PM
10/16/2011	5:55:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
